Evolution of silicon materials characterization : lessons learned for improved manufacturing /

Evolution of silicon materials characterization : lessons learned for improved manufacturing /

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Dades bibliogràfiques
Autor principal: Bullis, W. Murray, 1930-
Autor corporatiu: National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division
Format: Llibre
Idioma:English
Publicat: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1993.
Col·lecció:Semiconductor measurement technology
NIST special publication ; 400-92
Matèries:
Semiconductor wafers > Standards.
Electronics > Materials > Testing.
Silicon.

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