Patterning of material layers in submicron region /
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York :
J. Wiley,
1993.
|
| Subjects: | |
| Online Access: | Table of Contents Publisher description |
| Physical Description: | xii, 183 p. : ill. (some col.) ; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0470220635 (J. Wiley) 8122405614 (Wiley Eastern) |