Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
|
| Series: | NIST special publication ;
400-98 |
| Subjects: |
CARM 1 Store
| Call Number: |
A3:AE31C0 F06472 |
|---|---|
| Copy 1 | Available Place a Hold |