Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /

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Dades bibliogràfiques
Autor corporatiu: National Institute of Standards and Technology (U.S.)
Altres autors: Baghdadi, A., Scace, Robert I., Walters, E. Jane
Format: Llibre
Idioma:English
Publicat: Gaithersburg, Md. : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1989.
Col·lecció:Semiconductor measurement technology
NIST special publication ; 400-82
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