Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /
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Autor Corporativo: | |
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Outros Autores: | , , |
Formato: | Livro |
Idioma: | English |
Publicado em: |
Gaithersburg, Md. : Washington, DC :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1989.
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Colecção: | Semiconductor measurement technology
NIST special publication ; 400-82 |
Assuntos: |
Descrição do item: | "July 1989." |
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Descrição Física: | x, 168 p. : ill. ; 28 cm. |
Bibliografia: | Includes bibliographical references. |