Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Сохранить в:
Библиографические подробности
Соавтор: Society of Photo-optical Instrumentation Engineers
Другие авторы: Chen, Ray T., Lowell, John, Mathur, Jagdish P.
Формат: ‌
Язык:English
Опубликовано: Bellingham, Wash. : SPIE, 1996.
Серии:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Предметы:
Integrated circuits industry > Congresses.
Manufacturing processes > Congresses.
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Semiconductors > Testing > Optical methods > Congresses.
Optical detectors > Congresses.
Описание
Объем:ix, 218 p. : ill. ; 28 cm.
Библиография:Includes bibliographical references and index.
ISBN:0819422754

Схожие документы