Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /
保存先:
| 団体著者: | |
|---|---|
| その他の著者: | , , |
| フォーマット: | 図書 |
| 言語: | English |
| 出版事項: |
Bellingham, Wash. :
SPIE,
1996.
|
| シリーズ: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2877. |
| 主題: |
| 物理的記述: | ix, 218 p. : ill. ; 28 cm. |
|---|---|
| 書誌: | Includes bibliographical references and index. |
| ISBN: | 0819422754 |