Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

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Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Chen, Ray T., Lowell, John, Mathur, Jagdish P.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, 1996.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Subjects:
Integrated circuits industry > Congresses.
Manufacturing processes > Congresses.
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Semiconductors > Testing > Optical methods > Congresses.
Optical detectors > Congresses.
Description
Physical Description:ix, 218 p. : ill. ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819422754

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