Modeling the process dependence of electrical charges associated with the silicon/silicon-dioxide interface /

Modeling the process dependence of electrical charges associated with the silicon/silicon-dioxide interface /

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Détails bibliographiques
Auteur principal: Akinwande, Akintunde Ibitayo
Format: Thèse Livre
Langue:English
Publié: Ann Arbor, MI : University Microfilms International, c1987.
Sujets:
Silicon > Electric properties.
Silicon dioxide > Electric properties.
Oxidation.
Integrated circuits > Passivation.

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Cote: A1:AN09F0 C09696
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