Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

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Bibliographische Detailangaben
1. Verfasser: Vezzetti, Carol F.
Körperschaft: National Institute of Standards and Technology (U.S.)
Weitere Verfasser: Varner, Ruth N., Potzick, James E.
Format: Buch
Sprache:English
Veröffentlicht: Gaithersburg, Md. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1992.
Schriftenreihe:Standard reference materials
NIST special publication ; 260-117
Schlagworte:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.

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