Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /

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Detalles Bibliográficos
Autor principal: Potzick, James E.
Autor Corporativo: National Institute of Standards and Technology (U.S.)
Formato: Libro
Lenguaje:English
Publicado: Gaithersburg, MD : Washington, D.C. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O, [1997].
Colección:Standard reference materials
NIST special publication ; 260-129
Materias:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.

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