Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

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Podrobná bibliografie
Hlavní autor: Vezzetti, Carol F.
Další autoři: Potzick, James E., Varner, Ruth N.
Médium: Kniha
Jazyk:English
Vydáno: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1991.
Edice:Standard reference materials
NIST special publication ; 260-114
Témata:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.
Popis
Popis jednotky:"Issued January 1991."
Fyzický popis:xii, 33 p. : ill. ; 28 cm.
Bibliografie:Includes bibliographical references (p. 11-12)

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