Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

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Detalhes bibliográficos
Autor principal: Vezzetti, Carol F.
Outros Autores: Potzick, James E., Varner, Ruth N.
Formato: Livro
Idioma:English
Publicado em: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1991.
coleção:Standard reference materials
NIST special publication ; 260-114
Assuntos:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.

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