Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

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Bibliographic Details
Main Author: Vezzetti, Carol F.
Other Authors: Potzick, James E., Varner, Ruth N.
Format: Book
Language:English
Published: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1991.
Series:Standard reference materials
NIST special publication ; 260-114
Subjects:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.
Description
Item Description:"Issued January 1991."
Physical Description:xii, 33 p. : ill. ; 28 cm.
Bibliography:Includes bibliographical references (p. 11-12)

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