Integrated micro-motion systems : micromachining, control, and applications : a collection of contributions based on lectures presented at the Third Toyota Conference, Aichi, Japan, 22-25 October 1989 /

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Bibliographic Details
Corporate Author: Toyota Conference Aichi-ken, Japan
Other Authors: Harashima, Fumio
Format: Conference Proceeding Book
Language:English
Published: Amsterdam ; New York : Elsevier, c1990.
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