American Vacuum Society & American Institute of Physics. (1983). Journal of vacuum science & technology: An official journal of the American Vacuum Society. Published for the Society by the American Institute of Physics.
Chicago Style (17th ed.) CitationAmerican Vacuum Society and American Institute of Physics. Journal of Vacuum Science & Technology: An Official Journal of the American Vacuum Society. New York, N.Y.: Published for the Society by the American Institute of Physics, 1983.
MLA (8th ed.) CitationAmerican Vacuum Society and American Institute of Physics. Journal of Vacuum Science & Technology: An Official Journal of the American Vacuum Society. Published for the Society by the American Institute of Physics, 1983.
Warning: These citations may not always be 100% accurate.