Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :
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| New Title: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures |
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| Previous Title: | Journal of vacuum science and technology |
| Corporate Authors: | , |
| Format: | Journal |
| Language: | English |
| Published: |
New York, N.Y. :
Published for the Society by the American Institute of Physics,
1983-c1990.
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| Subjects: |
CARM 1 Store
| Call Number: |
A3:AB23D4 D01721 |
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| Copy 1 | Available Place a Hold |