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  1. 1
    Introduction to microlithography : theory, materials, and processing /
    Book
    Published 1983
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  2. 2
    Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /
    Conference Proceeding Book
    Published 1984
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  3. 3
    Microelectronic polymers /
    Book
    Published 1989
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  4. 4
    Electronic and photonic applications of polymers /
    Book
    Published 1988
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