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  1. 1
    Micromechanical systems, 1993 : presented at the 1993 ASME Winter Annual Meeting, New Orleans, Louisiana, November 28-December 3, 1993 /
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    Udgivet 1993
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  2. 2
    Smart electronics and MEMS /
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    Udgivet 1997
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  3. 3
    Smart structures and materials 1997. 4-6 March 1997, San Diego, California /
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    Udgivet 1997
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  4. 4
    Smart structures and materials 1998. 2-4 March 1998, San Diego, California /
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    Udgivet 1998
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  5. 5
    Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /
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    Udgivet 1996
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  6. 6
    Micromachined devices and components : 23-24 October, 1995, Austin, Texas /
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    Udgivet 1995
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