Microcircuit Engineering 84 : proceedings of the Microcircuit Engineering 84 Conference held in Berlin, West Germany, on 25-29 September, 1984 /
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| Corporate Author: | |
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
London ; Orlando :
Academic Press,
1985.
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| Subjects: |
| Physical Description: | xvii, 563 p. : ill. ; 24 cm. |
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| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0123457505 |