Microcircuit Engineering 84 : proceedings of the Microcircuit Engineering 84 Conference held in Berlin, West Germany, on 25-29 September, 1984 /

Saved in:
Bibliographic Details
Corporate Author: Microcircuit Engineering 84 Berlin, Germany
Other Authors: Heuberger, A., Beneking, H.
Format: Conference Proceeding Book
Language:English
Published: London ; Orlando : Academic Press, 1985.
Subjects:
Description
Physical Description:xvii, 563 p. : ill. ; 24 cm.
Bibliography:Includes bibliographies and index.
ISBN:0123457505