Winter Symposium 75 on Micro-Photofabrication, February 6, 7, 1975, Palo Alto Cabana Hyatt House, Palo Alto, California /

Winter Symposium 75 on Micro-Photofabrication, February 6, 7, 1975, Palo Alto Cabana Hyatt House, Palo Alto, California /

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Bibliographic Details
Corporate Authors: Winter Symposium 75 on Micro-Photofabrication Palo Alto, Calif, Society of Photographic Scientists and Engineers. Northern California Chapter
Format: Conference Proceeding Book
Language:English
Published: Washington : The Society, [1975?]
Subjects:
Microelectronics > Congresses.
Photolithography > Congresses.
Semiconductors > Congresses.
Description
Physical Description:ca. 250 p. : ill. ; 22 cm.
Bibliography:Includes bibliographical references.

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