The Capabilities and limitations of auger sputter profiling for studies of semiconductors /

The Capabilities and limitations of auger sputter profiling for studies of semiconductors /

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Korporace: United States. Defense Advanced Research Projects Agency, United States. National Bureau of Standards
Další autoři: Schwarz, S. A.
Médium: Vládní dokument Kniha
Jazyk:English
Vydáno: Washington, D.C : U.S. Dept. of Commerce, National Bureau of Standards, 1981.
Edice:NBS special publication ; 400-67
Semiconductor measurement technology
Témata:
Electron spectroscopy.
Semiconductors > Testing.
Sputtering (Physics)
Popis
Popis jednotky:"Issued September 1981.".
Item 247 (microfiche).
Fyzický popis:vi, 46 p. : ill ; 26 cm.
Bibliografie:Includes bibliographical references.

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