United States. Defense Advanced Research Projects Agency, United States. National Bureau of Standards, & Schwarz, S. A. (1981). The Capabilities and limitations of auger sputter profiling for studies of semiconductors. U.S. Dept. of Commerce, National Bureau of Standards.
Chicagoスタイル(17版)引用形式United States. Defense Advanced Research Projects Agency, United States. National Bureau of Standards, , S. A. Schwarz. The Capabilities and Limitations of Auger Sputter Profiling for Studies of Semiconductors. Washington, D.C: U.S. Dept. of Commerce, National Bureau of Standards, 1981.
MLA(8版)引用形式United States. Defense Advanced Research Projects Agency, et al. The Capabilities and Limitations of Auger Sputter Profiling for Studies of Semiconductors. U.S. Dept. of Commerce, National Bureau of Standards, 1981.