APA (7th ed.) Citation

(1998). Semiconductor measurement technology: Thin film reference materials development final report for CRADA CN-1364. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.

Chicago Style (17th ed.) Citation

Semiconductor Measurement Technology: Thin Film Reference Materials Development Final Report for CRADA CN-1364. Gaithersburg, MD: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1998.

MLA (8th ed.) Citation

Semiconductor Measurement Technology: Thin Film Reference Materials Development Final Report for CRADA CN-1364. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1998.