Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /

Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /

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書誌詳細
団体著者: National Institute of Standards and Technology (U.S.)
その他の著者: Baghdadi, A., Scace, Robert I., Walters, E. Jane
フォーマット: 図書
言語:English
出版事項: Gaithersburg, Md. : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1989.
シリーズ:Semiconductor measurement technology
NIST special publication ; 400-82
主題:
Silicon > Measurement > Databases.
Silicon > Measurement > Statistical methods.
Oxygen > Measurement > Databases.
Oxygen > Measurement > Statistical methods.
Infrared spectroscopy > Databases.
Infrared spectroscopy > Statistical methods.
その他の書誌記述
記述事項:"July 1989."
物理的記述:x, 168 p. : ill. ; 28 cm.
書誌:Includes bibliographical references.

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