Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /
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企业作者: | |
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其他作者: | , , |
格式: | 图书 |
语言: | English |
出版: |
Gaithersburg, Md. : Washington, DC :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1989.
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丛编: | Semiconductor measurement technology
NIST special publication ; 400-82 |
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Item Description: | "July 1989." |
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实物描述: | x, 168 p. : ill. ; 28 cm. |
参考书目: | Includes bibliographical references. |