Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /

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Korporativní autor: National Institute of Standards and Technology (U.S.)
Další autoři: Baghdadi, A., Scace, Robert I., Walters, E. Jane
Médium: Kniha
Jazyk:English
Vydáno: Gaithersburg, Md. : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1989.
Edice:Semiconductor measurement technology
NIST special publication ; 400-82
Témata:
Popis
Popis jednotky:"July 1989."
Fyzický popis:x, 168 p. : ill. ; 28 cm.
Bibliografie:Includes bibliographical references.