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| LEADER |
01725nam a2200349 a 4500 |
| 001 |
c000292220 |
| 003 |
CARM |
| 005 |
20090521153151.0 |
| 008 |
971103s1996 waua b 001 0 eng d |
| 019 |
1 |
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|a 13410100
|z 25122996
|5 LACONCORD2021
|
| 020 |
|
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|a 0819422754
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| 035 |
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|a (OCoLC)35664504
|5 LACONCORD2021
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| 040 |
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|a VU
|b eng
|c VU
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| 245 |
0 |
0 |
|a Optical characterization techniques for high-performance microelectronic device manufacturing III :
|b 16-17 October 1996, Austin, Texas /
|c Damon DeBusk, Ray T Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
|
| 260 |
|
|
|a Bellingham, Wash. :
|b SPIE,
|c 1996.
|
| 300 |
|
|
|a ix, 218 p. :
|b ill. ;
|c 28 cm.
|
| 490 |
1 |
|
|a Proceedings / SPIE--the International Society for Optical Engineering ;
|v v. 2877
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Integrated circuits industry
|x Congresses.
|
| 650 |
|
0 |
|a Manufacturing processes
|x Congresses.
|
| 650 |
|
0 |
|a Semiconductors
|x Design and construction
|x Congresses.
|
| 650 |
|
0 |
|a Integrated circuits
|x Design and construction
|x Congresses.
|
| 650 |
|
0 |
|a Semiconductors
|x Testing
|x Optical methods
|x Congresses.
|
| 650 |
|
0 |
|a Optical detectors
|x Congresses.
|
| 700 |
1 |
|
|a Chen, Ray T.
|
| 700 |
1 |
|
|a Lowell, John.
|
| 700 |
1 |
|
|a Mathur, Jagdish P.
|
| 710 |
2 |
|
|a Society of Photo-optical Instrumentation Engineers.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 2877.
|
| 852 |
8 |
|
|b CARM
|h A3:AE31C0
|i F06472
|p 0516601
|f BK
|
| 999 |
f |
f |
|i eea8faeb-c816-519c-be46-57f9b4ba9f8a
|s f6cb589a-3d99-571a-8783-6361ee29f5f1
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e F06472
|f A3:AE31C0
|h Other scheme
|i book
|m 0516601
|