Society of Photo-optical Instrumentation Engineers, Chen, R. T., Lowell, J., & Mathur, J. P. (1996). Optical characterization techniques for high-performance microelectronic device manufacturing III: 16-17 October 1996, Austin, Texas. SPIE.
توثيق أسلوب شيكاغو (الطبعة السابعة عشر)Society of Photo-optical Instrumentation Engineers, Ray T. Chen, John Lowell, و Jagdish P. Mathur. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. Bellingham, Wash.: SPIE, 1996.
توثيق جمعية اللغة المعاصرة MLA (الطبعة الثامنة)Society of Photo-optical Instrumentation Engineers, et al. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. SPIE, 1996.
تحذير: قد لا تكون هذه الاستشهادات دائما دقيقة بنسبة 100%.