Physical modeling of gettering in silicon /

Physical modeling of gettering in silicon /

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Bibliographic Details
Main Author: Bronner, Gary Bela
Format: Thesis Book
Language:English
Published: Ann Arbor, MI : University Microfilms International, [19--].
Subjects:
Getters.
Semiconductors > Defects.
Integrated circuits > Very large scale integration > Design and construction.
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245 1 0 |a Physical modeling of gettering in silicon /  |c by Gary Bela Bronner. 
260 |a Ann Arbor, MI :  |b University Microfilms International,  |c [19--]. 
300 |a xv, 133 p. :  |b ill. ;  |c 22 cm. 
502 |a Thesis (Ph.D.)--Stanford University, 1986. 
504 |a Bibliography: p. 119-133. 
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