Physical modeling of gettering in silicon /

Physical modeling of gettering in silicon /

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Bibliographic Details
Main Author: Bronner, Gary Bela
Format: Thesis Book
Language:English
Published: Ann Arbor, MI : University Microfilms International, [19--].
Subjects:
Getters.
Semiconductors > Defects.
Integrated circuits > Very large scale integration > Design and construction.
Description
Physical Description:xv, 133 p. : ill. ; 22 cm.
Bibliography:Bibliography: p. 119-133.

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