Micromachined devices and components : 23-24 October, 1995, Austin, Texas /

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Bibliografiske detaljer
Corporate Authors: National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Andre forfattere: Chau, Kevin, Roop, Ray
Format: Bog
Sprog:English
Udgivet: Bellingham, Wash. : SPIE, c1995.
Serier:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2642.
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CARM 1 Store

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Klassifikationsnummer: A1:AO16C0 F02473
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