Micromachined devices and components : 23-24 October, 1995, Austin, Texas /
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| Corporate Authors: | , , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
c1995.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2642. |
| Subjects: |
| Physical Description: | ix, 296 p. : ill. ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographic references and index. |
| ISBN: | 0819420085 |