Micromachined devices and components : 23-24 October, 1995, Austin, Texas /

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Bibliographic Details
Corporate Authors: National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Chau, Kevin, Roop, Ray
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, c1995.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2642.
Subjects:
Description
Physical Description:ix, 296 p. : ill. ; 28 cm.
Bibliography:Includes bibliographic references and index.
ISBN:0819420085