The MEMS handbook /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. ; London :
CRC Press,
c2002.
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| Series: | The Mechanical engineering handbook series
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| Subjects: |
| Physical Description: | 1 v. (various pagings) : ill. ; 26 cm. Also available online via the World Wide Web, by subscription to ENGnetBASE via CRC Press. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0849300770 (alk. paper) |