The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /

The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /

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Dettagli Bibliografici
Autore principale: Ehrstein, James R.
Ente Autore: National Institute of Standards and Technology (U.S.)
Altri autori: Croarkin, M. C. (Mary Carroll), 1934-
Natura: Libro
Lingua:English
Pubblicazione: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1999.
Edizione:1999 edition.
Serie:Standard reference materials
NIST special publication ; 260-131
Soggetti:
Silicon.
Silicon > Electric properties.
Descrizione
Descrizione del documento:"Issued June 1999."
Descrizione fisica:vi, 105 p. : ill. ; 28 cm.
Bibliografia:Includes bibliographical references.

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