The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /

The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /

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Bibliographic Details
Main Author: Ehrstein, James R.
Corporate Author: National Institute of Standards and Technology (U.S.)
Other Authors: Croarkin, M. C. (Mary Carroll), 1934-
Format: Book
Language:English
Published: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1999.
Edition:1999 edition.
Series:Standard reference materials
NIST special publication ; 260-131
Subjects:
Silicon.
Silicon > Electric properties.
Description
Item Description:"Issued June 1999."
Physical Description:vi, 105 p. : ill. ; 28 cm.
Bibliography:Includes bibliographical references.

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