Fundamentals of microelectronics processing /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill,
c1990.
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| Series: | McGraw-Hill chemical engineering series
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| Subjects: |
| Physical Description: | xvi, 514 p. : ill. ; 25 cm. |
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| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0070370567 : |