Emerging semiconductor technology : a symposium /
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| Corporate Authors: | , |
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Philadelphia, PA :
American Society for Testing and Materials,
c1987.
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| Series: | ASTM special technical publication ;
960 |
| Subjects: |
| Item Description: | Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46." |
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| Physical Description: | 704 p. : ill. ; 24 cm. |
| Bibliography: | Includes bibliographies and indexes. |
| ISBN: | 0803104596 |