Semiconductor fabrication : technology and metrology /
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| Corporate Authors: | , , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Philadelphia, PA :
ASTM,
c1989.
|
| Series: | ASTM special technical publication ;
990. |
| Subjects: |
| Item Description: | Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute. "ASTM publication code number (PCN) 04-990000-46"--T.p. verso. |
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| Physical Description: | 476 p. : ill. ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 0803112734 |