APA ציטוט

ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute, Symposium on Semiconductor Processing, & Gupta, D. C. (1989). Semiconductor fabrication: Technology and metrology. ASTM.

Chicago Style (17th ed.) Citation

ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute, Symposium on Semiconductor Processing, and D. C. Gupta. Semiconductor Fabrication: Technology and Metrology. Philadelphia, PA: ASTM, 1989.

ציטוט MLA

ASTM Committee F-1 on Electronics, et al. Semiconductor Fabrication: Technology and Metrology. ASTM, 1989.