APA (7th ed.) Citation

Institute for Applied Technology (U.S.). Electronic Technology Division. Semiconductor measurement technology. U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].

Chicago Style (17th ed.) Citation

Institute for Applied Technology (U.S.). Electronic Technology Division. Semiconductor Measurement Technology. [Washington]: U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].

MLA (8th ed.) Citation

Institute for Applied Technology (U.S.). Electronic Technology Division. Semiconductor Measurement Technology. U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].