Microelectronics : processing and device design /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Wiley,
c1980.
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| Subjects: |
| Physical Description: | ix, 333 p. : ill. ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0471043397 : |