Integrated circuit technology: instrumentation and techniques, for measurement, process and failure analysis.
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York, :
McGraw-Hill,
[1967].
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| Subjects: |
| Physical Description: | xxii, 340 p. : illus. ; 26 cm. |
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| Bibliography: | Includes bibliographies. |