Ion implantation of semiconductors /
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
London :
Edward Arnold,
1976.
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| Series: | Contemporary electrical engineering
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| Subjects: |
| Physical Description: | viii, 214 p. : ill. ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0713133589 : 0713133651(pbk.) |