Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /

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Bibliografiske detaljer
Institution som forfatter: Pfefferkorn Conference Monterey, Calif.
Andre forfattere: Kyser, David F.
Format: Conference Proceeding Bog
Sprog:English
Udgivet: AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc., c1984.
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