Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /

Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /

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Bibliographic Details
Corporate Author: Pfefferkorn Conference Monterey, Calif.
Other Authors: Kyser, David F.
Format: Conference Proceeding Book
Language:English
Published: AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc., c1984.
Subjects:
Solids > Effect of radiation on > Congresses.
Electron beams > Congresses.
Electrons > Scattering > Congresses.
Backscattering > Congresses.
Microlithography > Congresses.
Electron energy loss spectroscopy > Congresses.
Description
Physical Description:xii, 372 p. : ill. ; 29 cm.
Bibliography:Includes bibliographies and indexes.
ISBN:0931288304

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