Introduction to microlithography : theory, materials, and processing /

Introduction to microlithography : theory, materials, and processing /

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Dettagli Bibliografici
Enti autori: American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting
Altri autori: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Bowden, M. J., 1943-
Natura: Libro
Lingua:English
Pubblicazione: Washington, D.C. : The Society, 1983.
Serie:ACS symposium series ; 219.
Soggetti:
Microlithography > Congresses.
Photoresists > Congresses.
Plasma etching > Congresses.
Semiconductors > Etching > Congresses.

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