American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, Thompson, L. F., Willson, C. G., & Bowden, M. J. (1983). Introduction to microlithography: Theory, materials, and processing. The Society.

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, L. F. Thompson, C. G. Willson, and M. J. Bowden. Introduction to Microlithography: Theory, Materials, and Processing. Washington, D.C.: The Society, 1983.

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, et al. Introduction to Microlithography: Theory, Materials, and Processing. The Society, 1983.