The Journal of vacuum science and technology.
Saved in:
| New Title: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Journal of vacuum science & technology. B, Microelectronics processing and phenomena |
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| Corporate Authors: | , |
| Format: | Journal |
| Language: | English |
| Published: |
[New York, N.Y.] :
Published for the American Vacuum Society by the American Institute of Physics,
[1964-1982]
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| Subjects: |
| Published: | Vol. 1, no. 1 (Sept./Oct. 1964)-v. 21, no. 4 (Nov./Dec. 1982). |
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| Item Description: | Title varies slightly. Title from cover. |
| Physical Description: | 21 v. : ill. ; 28 cm. Also available on microfilm. |
| Publication Frequency: | 8 no. a year, Jan. 1982-Nov./Dec. 1982 |
| ISSN: | 0022-5355 0734-2101 0734-211X |
| Related Items: | Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena. |