VLSI electronics : microstructure science /
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| Další autoři: | |
|---|---|
| Médium: | Kniha |
| Jazyk: | English |
| Vydáno: |
New York :
Academic Press,
1981-c1993.
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| Témata: |
Obsah:
- v. 1-5. [without special titles]
- v. 6. Materials and process characterization
- v. 7. [without special title]
- v. 8. Plasma processing for VLSI
- v. 9. [without special title]
- v. 10. Surface and interface effects in VLSI
- v. 11. GaAs microelectronics
- v. 12. Silicon materials
- v. 13. Metal-semiconductor contacts and devices
- v. 14. VLSI design
- v. 15. VLSI metallization
- v. 16. Lithography for VLSI
- v. 17. VLSI in medicine
- v.18. Advanced MOS device physics
- 19. Advanced CMOS process technology
- v. 21. Beam processing technologies
- v. 22. VLSI reliability
- v. 23. Application specific integrated circuit (ASIC) technology
- v. 24. Heterostructures and quantum devices.